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Tohru Ogawa

Tohru Ogawa, Japanese electrical engineer, researcher. Achievements include patents for SiON inorganic anti-reflective layer; weak off-axis illuminaion in microlithography. Member International Society for Optical Engineering (program committee optical micro-lithography section since 1994).

Background

  • Ogawa, Tohru was born on August 14, 1959 in Kawasaki, Japan. Son of Tadashi and Shima (Hakari) Ogawa.

  • Education

    • Bachelor in Physics, Rikkyo University, Tokyo, 1984. Doctor of Electronics, Tokyo Institute of Technology, 1997.

    Career

    • Engineer Canon Inc., Japan, 1985-1990. Senior research scientist SONY corporation, Japan, 1990-1996, manager Japan, since 1999. Team leader Selete, Japan, 1997-1999.

    Major achievements

    • Achievements include patents for SiON inorganic anti-reflective layer. Weak off-axis illuminaion in microlithography.

    Works

    • Contributor articles to professional journals. Patentee in field.

    Membership

    Member International Society for Optical Engineering (program committee optical micro-lithography section since 1994).

    Connections

    • Married Kyoko Taira, May 30, 1992. 1 child, Mayu.
    • father: Tadashi Ogawa
    • mother: Shima (Hakari) Ogawa
    • spouse: Kyoko Taira
    • child: Mayu Ogawa
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    Born August 14, 1959
    (age 57)
    Nationality
    • 1984
      Rikkyo University
    • 1997
      Tokyo Institute of Technology
    • 1985 - 1990
      Engineer, Canon Incorporated
      Japan
    • 1990 - 1996
      senior, research scientist SONY corporation
      Japan
    • 1997 - 1999
      team leader, Selete
      Japan