Achievements
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patents for Method for fabrication of multilevel metallization for integrated circuits, Patent of Belarus 1777514, H01L 21/28, 1992
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patents for Method for fabrication of spacers for liquid crystal displays, Invention Certificate of Union of the Soviet Socialist Republics N1644653, 1989
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first to Novel Nanocomposite Dielectrics for Electrolytic and Thin-film Capacitors by Anodizing Technique
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first to Nanostructured Metal-Oxide Resistive Coatings by Anodizing of Ta-Al Bilayers
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first to Novel nanoporous anodic alumina separator for Li-metal rechargeable batteries
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first to Revealed and described the formation of nanostructured anodic oxides on Ta, Nb and Zr under a porous alumina film
