Background
Wasa, Kiyotaka was born on February 24, 1937 in Osaka, Japan.
( This thoroughly updated new edition includes an entirel...)
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. • A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available • All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique • 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere
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(A concise, comprehensive overview of sputter deposition t...)
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
http://www.amazon.com/gp/product/0815512805/?tag=2022091-20
Wasa, Kiyotaka was born on February 24, 1937 in Osaka, Japan.
Bachelor of Science, Osaka University, 1960. Doctor of Philosophy, Osaka University, 1968.
Researcher, Matsushita Electric, Moriguchi, Japan, 1960-1975; senior scientist, Matsushita Electric, Moriguchi, Japan, 1976-1982; chief scientist, Matsushita Electric, Moriguchi, Japan, 1983-1988; vice president, Matsushita Electric, Moriguchi, Japan, since 1989; deputy director-general, Research Institute Innovative Technology for Earth, Kyoto, Japan, since 1990. Professor Osaka U., 1983-1988. Visiting professor Pennsylvania State University, since 1994, Kanazawa (Japan) U., since 1995.
( This thoroughly updated new edition includes an entirel...)
(A concise, comprehensive overview of sputter deposition t...)
Fellow Institute of Electrical and Electronics Engineers, materials research society India. Member American Vacuum Society, Japan Society Applied Physics (vice chairman TF division 1986-1988).
M. Setsuko Tachibana, March 26, 1966. 1 child, Yasuko.