Education
He earned a Master of Surgery degree and a Doctor of Philosophy degree in electrical engineering from the University of California, Berkeley in 1981 and 1984, respectively.
professor of Electrical Engineering
He earned a Master of Surgery degree and a Doctor of Philosophy degree in electrical engineering from the University of California, Berkeley in 1981 and 1984, respectively.
He earned a Bachelor of Surgery degree in physics from Harvey Mudd College, Claremont, California. He was a faculty member at Carnegie-Mellon University in 1984-1985, at the Massachusetts Institute of Technology from 1985-1987, and at University of California Berkeley between 1987-2005. He has been a professor at Stanford University since then His research interests focuses on micro electromechanical system (Microelectromechanical Systems), and nanoscale devices and fabrication technology.
He and his Doctor of Philosophy advisor, Professor
Richard South. Muller at Berkeley, developed polysilicon surface micromachining technology. Such a process opened the possibilities of micro mechanical elements such as cantilevers, resonators, and gears.
He was elected an Institute of Electrical and Electronics Engineers Fellow in 1996, for "seminal contributions to microfabrication technologies, devices, and micro-electromechanical systems". In 2005, he was elected to the United States. National Academy of Engineering.
"for contributions to the development of microelectromechanical systems in processes, devices and systems".
Since 2011, he has been the Director of the United States. National Nanotechnology Infrastructure Network (NNIN).
He is a member of the United States National Academy of Engineering.
