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Tohru Ogawa

researcher , electrical engineer

Tohru Ogawa, Japanese electrical engineer, researcher. Achievements include patents for SiON inorganic anti-reflective layer; weak off-axis illuminaion in microlithography. Member International Society for Optical Engineering (program committee optical micro-lithography section since 1994).

Background

Ogawa, Tohru was born on August 14, 1959 in Kawasaki, Japan. Son of Tadashi and Shima (Hakari) Ogawa.

Education

Bachelor in Physics, Rikkyo University, Tokyo, 1984. Doctor of Electronics, Tokyo Institute of Technology, 1997.

Career

Engineer Canon Inc., Japan, 1985-1990. Senior research scientist SONY corporation, Japan, 1990-1996, manager Japan, since 1999. Team leader Selete, Japan, 1997-1999.

Achievements

  • Achievements include patents for SiON inorganic anti-reflective layer. Weak off-axis illuminaion in microlithography.

Works

  • Contributor articles to professional journals. Patentee in field.

Membership

Member International Society for Optical Engineering (program committee optical micro-lithography section since 1994).

Connections

Married Kyoko Taira, May 30, 1992. 1 child, Mayu.

father:
Tadashi Ogawa

mother:
Shima (Hakari) Ogawa

spouse:
Kyoko Taira

child:
Mayu Ogawa