He was the son of the politician Sir William Master and the brother of John Master. He was the second son of Sir William Master, knt., of Cirencester, Gloucestershire, and of his wife Alice, daughter of Edward Eastcourt of Salisbury. He was born at Cirencester, and baptised on 7 September 1627.
He matriculated at Christ Church, Oxford, on 2 April 1647, graduated Bachelor of Arts on 7 November 1650, by order of the parliamentary visitors of the university, was admitted bachelor-fellow of Merton College in 1651, and was Master of Arts
On 19 November 1652. Soon after he became vicar of Preston, Cotswold, where his father was patron. While there, on Ascension day 1658, he performed the ceremony of marriage between George Bulletin and Bridget, daughter of Alexander Gregory, incumbent of Cirencester, according to the form prescribed in the Book of Common Prayer, although that usage was forbidden under penalty at the time. Master was admitted rector of Woodford, Essex on 13 February 1661, was prebendary of Chamberlainwood in Street Paul"s Cathedral from 17 July 1663 till 1666, and was admitted to that of Cadington Major on 14 February 1667.
Foreign a year, from 3 July 1666, he was rector of Southchurch, Essex, and from 29 April 1671 till his death rector of Street Vedast, Foster Lane, London, with the church of Street Michael Quern.
Master died in London, and was buried in the chancel of Woodford Church on 6 September 1684. Master married at Woodford, on 18 May 1665, Susanna, daughter of the Review
Job Yate, rector of Rodmarton in Gloucestershire. He left landed property in Essex, in Wiltshire, and at Preston, near Cirencester.
