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Dale Edward Ibbotson Edit Profile

researcher , Chemical engineer

Dale Edward Ibbotson, American chemical engineer, researcher. Achievements include patents for Microelectronics Processing; discovery of crystallographic dry etching of III-V compound semiconductor materials, plasma deposited silicon nitride containing fluorine for Very-large-scale integration devices, metal-catalyzed dry etching of silicon materials, advanced processing techniques for Very-large-scale integration device materials.

Background

Ibbotson, Dale Edward was born on January 11, 1954 in Mount Carmel, Illinois, United States. Son of John E. and Laura J. (Marriott) Ibbotson.

Education

Bachelor of Science in Chemical Engineering cum laude, University of Illinois, 1976; Doctor of Philosophy in Chemical Engineering, California Institute Technology, Pasadena, 1981.

Career

Member technical staff engineering and research, American Telephone & Telegraph Company Bell laboratories, Murray Hill, New Jersey, 1981-1989; distinguished member technical staff engineering and research, American Telephone & Telegraph Company Bell laboratories, Murray Hill, New Jersey, 1989-1991; supervisor plasma processing research group, American Telephone & Telegraph Company Bell laboratories, Murray Hill, New Jersey, since 1991. Chair Gordon Research Conference Plasma Chemistry, 1992. Member roadmap committee Semiconductor Research Corporation, Research Triangle park, North Carolina, 1989.

Achievements

  • Achievements include patents for Microelectronics Processing. Discovery of crystallographic dry etching of III-V compound semiconductor materials, plasma deposited silicon nitride containing fluorine for Very-large-scale integration devices, metal-catalyzed dry etching of silicon materials, advanced processing techniques for Very-large-scale integration device materials.

Works

  • Other Work

    • Author: (chapter) Ion Bombardment Modification of Surfaces, 1984, Very-large-scale integration Electronics: Microstructure Science, Plasma Processing for Very-large-scale integration, 1984. Contributor over 60 articles to professional journals.

Membership

Member American Physical Society, American Vacuum Society.

Connections

Married Elizabeth Ann Equi, August 9, 1980. Chindren: Matthew Gianni Equi, Steven Dale Edward.

father:
John E. Ibbotson

mother:
Laura J. (Marriott) Ibbotson

spouse:
Elizabeth Ann Equi