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Yung-Hsien Wu Edit Profile

Engineering educator

Yung-Hsien Wu, Chinese engineering educator. Recipient Individual Achievement on Intellectual Property Right, ProMOS Technology, 2002, 2003, Referee of Electrochemical and Solid-State Letters, Electrochemical Society; grantee Ge Metal-Oxide-Semiconductor Field Effect Transistor Fabrication on Si, National Science Council, 2006-2007; Scholarship for Study Abroad, Ministry of Education, 2005.


Wu, Yung-Hsien was born on February 19, 1974 in Taipei, Taiwan.


Bachelor, National Tsing Hua University, Hsinchu, Taiwan, 1996. Doctor of Philosophy, National Chiao Tung University, Taiwan, 2000.


Senior engineer ProMOS Technology, Hsinchu, 2000—2004, section manager, 2004—2005. Assistant professor National Tsing Hua University, since 2005. Consultant in field.


  • Achievements include patents for method for fabricating stack structures in a semiconductor device. Invention of in-situ nitridation in wet ambient for storage dielectric to enhance cell capacitance. Invention of thin gate oxide quality enhancement in ONO stack film for flash memory.

    Invention of high-k dielectric La2O3 investigation and integration to Metal-Oxide-Semiconductor Field Effect Transistor. Invention of high resistivity Si fabrication and application to high frequency operation. Invention of HSG growth and integration in trench Dynamic Random Access Memory for 1T-Static Random Access Memory applications.

    Patents for improve memory cell capacitance by N2O treatment of November stack dielectric. Patents for method of forming an oxynitride layer. Patents for capacitor dielectric structure of a Dynamic Random Acess Memory cell and method for forming thereof.

    Patents for method of removal of hemispherical grained silicon in a deep trench. Patents for dual gate nitride process. Patents for integration of Silicon Carbide into Dynamic random-access memory cell to improve retention characteristics.

    Invention of formation of SiGe on Si by solid phase epitaxy. Invention of novel BPSG deposition method for Self Align Contact (Strategic Air Command) process.


Member Fund for Children and Families, Taiwan, 2003—2006. Member of Teachers Association, Electrochemical Society.


Married Yi-Ru Chen, December 25, 2001. Children: Chen-Da, Chun-Yin.

Yi-Ru Chen

Chen-Da Wu

Chun-Yin Wu