Career
According to the results of theoretical studies of general regularities of the functioning of the electrostatic micro-mechanical systems (EMS), we derive generalized formulas for simplified engineering calculations. This allows at the time of simulation and design of concrete structures to take into account the specifics of the work and to choose the optimal variant of the construction. The result is greatly simplified modeling. General rules of the operating cycle, describing the specifics of on and off the EMC. The relations obtained relate the basic parameters of electro-mechanical and EMC are the theoretical basis for calculations. This provides a wider choice of optimal size of mobile elements that provide the required operating voltage with minimum weight and size indicators and acceptable mechanical stress in deformable parts. The ways of extending the functionality of MEMS / MOEMS variety of designs that exceed traditional, and in some cases have no analogues in the world.
Metal oxide thin film developed and combined catalytic bead and termokonduk-tometrichesky sensors on the thermo-electric effect. Allows you to selectively determine the concentration of hydrogen (0.01-100% vol.) In the air. Opens the possibility of building on this principle of selective sensors range of combustible gases.
Multi-sensor systems, including several different types of sensors on a single substrate (bionanotechnology, medicine, environmental monitoring, automotive, mikrorobototehnika, Aviation, rocket and space technology, etc.).